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AJA eight-target Magnetron Sputtering Deposition System |
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| Six-target Magnetron Sputtering System | |
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| Auto 306 E-beam Evaporator System | |
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| Riber III-V semiconductor MBE System |
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| Home-built UHV Thermal Evaporator | |
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| Home-built Magnetic Field Annealing System (in progress) | |